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Monday, May 4, 2020 | History

3 edition of Low-energy sputtering research found in the catalog.

Low-energy sputtering research

P. K. Ray

Low-energy sputtering research

  • 322 Want to read
  • 21 Currently reading

Published by National Aeronautics and Space Administration, Glenn Research Center, National Technical Information Service, distributor in [Cleveland, Ohio], Springfield, VA .
Written in

    Subjects:
  • Propulsion.,
  • Molybdenum.,
  • Xenon.,
  • Ion currents.,
  • Sputtering.,
  • Accumulators.,
  • Backscattering.,
  • Ion beams.

  • Edition Notes

    Other titlesLow energy sputtering research.
    StatementP.K. Ray and V. Shutthanandan.
    Series[NASA contractor report] -- NASA/CR-1999-209162., NASA contractor report -- NASA CR-209162.
    ContributionsShutthanandan, V., NASA Glenn Research Center.
    The Physical Object
    FormatMicroform
    Pagination1 v.
    ID Numbers
    Open LibraryOL18138715M


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Low-energy sputtering research by P. K. Ray Download PDF EPUB FB2

Sputtering yields of gold (Au) by noble gas (He, Ne, Ar, Kr or Xe) ions have been measured in the low injection energy range eV. The Low-energy sputtering research book data presented here were obtained from mass.

COVID Resources. Reliable information about the coronavirus (COVID) is available from the World Health Organization (current situation, international travel).Numerous and frequently-updated resource results are available from this ’s WebJunction has pulled together information and resources to assist library staff as they consider how to handle coronavirus.

ELSEVIER Nuclear Instruments and Methods in Physics Research B () Beam Interactions with Materials & Atoms Pt thin films prepared by low energy plasma sputtering Y. Suzuki *, A. Okamoto, M. Yoshitake, S.

Ogawa Technology Research Institute of Osaka Prefecture, Ayumino, Izumi-shi, OsakaJapan Abstract Platinum thin film has been prepared by low energy plasma Cited by: 3. Modeling low energy sputtering of hexagonal boron nitride by xenon ions Article (PDF Available) in Journal Low-energy sputtering research book Applied Physics (12) - January with Reads.

measure low-energy sputtering yields from molybdenum with xenon ions using both RBS and SNMS methods. The objective of this research was to set up an experimental assembly to bombard materials with low-energy ions and obtain sputtering yield data under well-defined experimental by: 7. Using molecular dynamics simulation, we have studied the low-energy sputtering at the energies near the sputtering threshold.

Different projectile-target combinations of noble metal atoms (Cu, Ag, Au, Low-energy sputtering research book, Pd, and Pt) are simulated in the range of incident energy from to eV. It is found that the threshold energies for sputtering are Low-energy sputtering research book for the cases of M Low-energy sputtering research book Cited by: 6.

A high quality of fit at p= and q=1 suggests that, for a rough estimate of the low-energy sputtering yield, one may simulate sputtering of a single elemental target and then use Eq. (1) to extract A and to find the yields for all other (elemental) targets. Low-energy sputtering research book a procedure 1 was carried out for projectiles utilized in, i.e.

Ne, Ar, Kr and Xe ions (E 0 =– eV).Cited by: 6. @article{osti_, title = {Low-energy ion beam-based deposition of gallium nitride}, author = {Vasquez, M.

R., E-mail: [email protected] and Wada, M.}, abstractNote = {An ion source with a remote plasma chamber excited by a MHz radio frequency power was used for low-energy broad ion beam extraction. Optical emission spectral analyses showed the sputtering and.

In vacuo low-energy ions scattering studies of ZrO2 growth by magnetron sputtering J.M. Sturm, Roger Coloma Ribera, Robbert Wilhelmus Elisabeth van de Kruijs, Andrey Yakshin.

―Dr. Baglin - IBM Almaden Research Center, USA "Since the inception of nanotechnology in the s, low-energy ion-beam sputtering of solids has been expected to rank among the top routes to nanostructures : Hardcover.

Kenneth Kingdon and Irving Langmuir (American surface chemist, Nobel Laureate in Chemistry for his research in surface science), from the General Electric Research Laboratory, dropped the “l” in favor of the word sputtering in their Physical Review paper on “The removal of thorium from the surface of a thoriated-tungsten (light.

Preparation of atomically clean and flat Si() surfaces by low-energy ion sputtering and low-temperature annealing. Authors. Kim J.

Ji J. Tucker T. Shen, Utah State University Follow. Document Type. Article. Journal/Book Title/Conference. Applied Surface Science. Issue.

Publication Date. Recommended Citation. @article{osti_, title = {Handbook of ion beam processing technology}, author = {Cuomo, J.J. and Rossnagel, S.M.

and Kaufman, H.R.}, abstractNote = {The work presented in this book deals with ion beam processing for basic sputter etching of samples, for sputter deposition of thin films, for the synthesis of material in thin form, and for the modification of the properties of thin films. As a wide band-gap and direct transition semiconductor material, ZnO has good scintillation performance and strong radiation resistance, but it also has a serious self-absorption phenomenon that affects its light output.

After being doped with Ga, it can be used for the scintillator of ultra-fast scintillating detectors to detect X-ray, gamma, neutron, and charged particles with extremely fast. abstract = "Low energy particle bombardment of the substrate and growing film, which has traditionally been associated with sputter deposition, has also been used with considerable success in other vapor phase film growth techniques such as MBE and PA-CVD.

The electronic structures of nitrogen species incorporated into highly oriented pyrolytic graphite (HOPG), prepared by low energy ( eV) nitrogen ion sputtering and subsequent annealing at K, were investigated by X-ray photoelectron spectroscopy (XPS), angle-dependent X-ray absorption spectroscopy (XAS), and Raman spectroscopy.

Spontaneous Patterning of Surfaces by Low-Energy Ion Beams, E. Chason, W.L. Chan, Materials Science with Ion Beams in Book Series: Topics in Applied Physics Volume: Pages: () Real-time SEM/FIB studies of Whisker Growth and Surface Modification, Nitin Jadhav, Eric Buchovecky, Eric Chason, Allan Bower.

compilation of low-energy collision cross sections and data on sputtering yield, references and an index. The style of the book is lively, almost conversational, with an emphasis on physical concepts rather than math-ematical rigour.

The book should appeal to. In physics, sputtering is a phenomenon in which microscopic particles of a solid material are ejected from its surface, after the material is itself bombarded by energetic particles of a plasma or gas. It occurs naturally in outer space, and can be an unwelcome source of wear in precision components.

However, the fact that it can be made to act on extremely fine layers of material is utilised. —Dr. Baglin - IBM Almaden Research Center, USA "Since the inception of nanotechnology in the s, low-energy ion-beam sputtering of solids has been expected to rank among the top routes to nanostructures fabrication.

This chapter deals with the experimental research and computer simulation of low- and medium-energy (E 0 = keV) ion collisions on the surface of a solid and of the accompanying effects, namely scattering, sputtering, and surface implantation.

Experimental and computer simulation studies of low-energy (Е 0 = 80– eV) Cs+ ions scattering on Ta, W, Re target surfaces and K+ ions.